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1

Distributed force probe bending model of critical dimension atomic force microscopy bias

Ukraintsev, Vladimir A., Orji, Ndubuisi G., Vorburger, Theodore V., Dixson, Ronald G., Fu, Joseph, Silver, Rick M.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2013

Langue:

english

Fichier:

PDF, 4.03 MB

english, 2013

2

Estimating error rates for firearm evidence identifications in forensic science

Song, John, Vorburger, Theodore V., Chu, Wei, Yen, James, Soons, Johannes A., Ott, Daniel B., Zhang, Nien Fan

Journal:

Forensic Science International

Année:

2018

Langue:

english

Fichier:

PDF, 6.81 MB

english, 2018

3

Verifying Measurement Uncertainty Using a Control Chart with Dynamic Control Limits

Song, John, Vorburger, Theodore

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2007

4

Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

Choi, Jinho, Park, Byong Chon, Ahn, Sang Jung, Kim, Dal-Hyun, Lyou, Joon, Dixson, Ronald G., Orji, Ndubuisi G., Fu, Joseph, Vorburger, Theodore V.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2016

Langue:

english

Fichier:

PDF, 3.46 MB

english, 2016

5

Roughness Measurement Performance Obtained with Optical Interferometry and Stylus Method

Rhee, Hyug-Gyo, Lee, Yun-Woo, Lee, In-Won, Vorburger, Theodore V.

Journal:

Journal of the Optical Society of Korea

Année:

2006

Fichier:

PDF, 547 KB

2006

6

Automatic identification of bullet signatures based on consecutive matching striae (CMS) criteria

Chu, Wei, Thompson, Robert M., Song, John, Vorburger, Theodore V.

Journal:

Forensic Science International

Année:

2013

Langue:

english

Fichier:

PDF, 1.12 MB

english, 2013

7

Surface Metrology

Vorburger, Theodore

Journal:

Optical Engineering

Année:

1985

Langue:

english

Fichier:

PDF, 3.37 MB

english, 1985

8

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Determination of optimal parameters for CD-SEM measurement of line-edge roughness

Bunday, Benjamin D., Bishop, Michael, McCormack, Jr., Donald W., Villarrubia, John S., Vladar, Andras E., Dixson, Ronald, Vorburger, Theodore V., Orji, N. G., Allgair, John A., Silver, Richard M.

Année:

2004

Langue:

english

Fichier:

PDF, 509 KB

english, 2004

9

SPIE Proceedings [SPIE 1985 Los Angeles Technical Symposium - Los Angeles (Monday 21 January 1985)] Measurement and Effects of Surface Defects & Quality of Polish - Surface Roughness Metrology By Angular Distributions Of Scattered Light

Gilsinn, David E., Vorburger, Theodore V., Teague, E.Clayton, MeLay, Michael J., Giauque, Charles, Scire, Fredric E., Baker, Lionel R., Bennett, Harold E.

Année:

1985

Langue:

english

Fichier:

PDF, 2.14 MB

english, 1985

10

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Calibration of scanning electron microscope magnification standards SRM484

Fu, Joseph, Vorburger, Theodore V., Ballard, David B., Jones, Susan K.

Année:

1996

Langue:

english

Fichier:

PDF, 269 KB

english, 1996

11

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XI - Yokohama, Japan (Wednesday 14 April 2004)] Photomask and Next-Generation Lithography Mask Technology XI - Study of an image stitching method for linewidth measurement

Chu, Wei, Tanabe, Hiroyoshi, Zhao, Xuezeng, Fu, Joseph, Vorburger, Theodore V.

Année:

2004

Langue:

english

Fichier:

PDF, 299 KB

english, 2004

12

SPIE Proceedings [SPIE 1986 Quebec Symposium - Quebec City, Canada (Tuesday 3 June 1986)] Optical Techniques for Industrial Inspection - Optical Roughness Measurements Of Industrial Surfaces

Gilsinn, David, Vorburger, Theodore, Cao, Lin-Xiang, Giauque, Charles, Scire, Fredric, Teague, E.Clayton, Cielo, Paolo G.

Année:

1986

Langue:

english

Fichier:

PDF, 1.93 MB

english, 1986

13

Sinusoidal profile precision roughness specimens

E.Clayton Teague, Fredric E. Scire, Theodore V. Vorburger

Journal:

Année:

1982

Langue:

english

Fichier:

PDF, 1001 KB

english, 1982

14

A model of an optical roughness-measuring instrument

Aaron B. Kiely, Thomas R. Lettieri, Theodore V. Vorburger

Journal:

International Journal of Machine Tools and Manufacture

Année:

1992

Langue:

english

Fichier:

PDF, 218 KB

english, 1992

15

Internet-based surface metrology algorithm testing system

Son H. Bui, T. Brian Renegar, Theodore V. Vorburger, Jay Raja, Mark C. Malburg

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 496 KB

english, 2004

16

Light Scattering from Manufactured Surfaces

E. Clayton Teague, Theodore V. Vorburger, Daniel Maystre, R.D. Young

Journal:

CIRP Annals - Manufacturing Technology

Année:

1981

Langue:

english

Fichier:

PDF, 1.11 MB

english, 1981

17

In-Process and On-Line Measurement of Surface Finish

Russell D. Young, Theodore V. Vorburger, E. Clayton Teague

Journal:

CIRP Annals - Manufacturing Technology

Année:

1980

Langue:

english

Fichier:

PDF, 820 KB

english, 1980

18

Effects of defocus and algorithm on optical step height calibration

Takuma Doi, Theodore Vorburger, Paul Sullivan

Journal:

Precision Engineering

Année:

1999

Langue:

english

Fichier:

PDF, 1.31 MB

english, 1999

19

Computational Models of a Nano Probe Tip for Static Behaviors

Shaw C. Feng, Theodore V. Vorburger, Che bong Joung, Ronald G. Dixson, Joseph Fu, Li Ma

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 497 KB

english, 2008

20

Three-dimensional Image Correction of Tilted Samples Through Coordinate Transformation

Joseph Fu, Wei Chu, Ronald Dixson, Theodore Vorburger

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 107 KB

english, 2008

21

Traceability for ballistics signature measurements in forensic science

John Song, Theodore Vorburger, Susan Ballou, Li Ma, Thomas Renegar, Alan Zheng, Martin Ols

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 263 KB

english, 2009

22

Surface metrology algorithm testing system

Son H. Bui, Theodore V. Vorburger

Journal:

Precision Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2007

23

Traceable pico-meter level step height metrology

Ndubuisi G. Orji, Ronald G. Dixson, Joseph Fu, Theodore V. Vorburger

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 268 KB

english, 2004

24

Pilot Study of Automated Bullet Signature Identification Based on Topography Measurements and Correlations

Wei Chu, John Song, Theodore Vorburger, James Yen, Susan Ballou, Benjamin Bachrach

Journal:

Journal of Forensic Sciences

Année:

2010

Langue:

english

Fichier:

PDF, 434 KB

english, 2010

25

Striation Density for Predicting the Identifiability of Fired Bullets with Automated Inspection Systems

Wei Chu, John Song, Theodore Vorburger, Susan Ballou

Journal:

Journal of Forensic Sciences

Année:

2010

Langue:

english

Fichier:

PDF, 230 KB

english, 2010

26

Stylus profiling at high resolution and low force

Song, J. F., Vorburger, Theodore V.

Journal:

Année:

1991

Langue:

english

Fichier:

PDF, 1.11 MB

english, 1991

27

Light-scattering measurement of the rms slopes of rough surfaces

Cao, Lin-xiang, Vorburger, Theodore V., George Lieberman, A., Lettieri, Thomas R.

Journal:

Année:

1991

Langue:

english

Fichier:

PDF, 759 KB

english, 1991

28

Light scattering from glossy coatings on paper

Lettieri, Thomas R., Marx, Egon, Song, Jun-Feng, Vorburger, Theodore V.

Journal:

Année:

1991

Langue:

english

Fichier:

PDF, 1.09 MB

english, 1991

29

Regimes of surface roughness measurable with light scattering

Vorburger, Theodore V., Marx, Egon, Lettieri, Thomas R.

Journal:

Année:

1993

Langue:

english

Fichier:

PDF, 992 KB

english, 1993

30

Light scattering by sinusoidal surfaces: illumination windows and harmonics in standards

Marx, Egon, Lettieri, Thomas R., Vorburger, Theodore V.

Journal:

Année:

1995

Langue:

english

Fichier:

PDF, 297 KB

english, 1995

31

Measurements and predictions of light scattering by clear coatings

McKnight, Mary E., Vorburger, Theodore V., Marx, Egon, Nadal, Maria E., Barnes, P. Yvonne, Galler, Michael A.

Journal:

Année:

2001

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2001

32

Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Rhee, Hyug-Gyo, Vorburger, Theodore V., Lee, Jonathan W., Fu, Joseph

Journal:

Année:

2005

Langue:

english

Fichier:

PDF, 282 KB

english, 2005

33

Subpixel image stitching for linewidth measurement based on digital image correlation

Chu, Wei, Fu, Joseph, Vorburger, Theodore V

Journal:

Measurement Science and Technology

Année:

2010

Langue:

english

Fichier:

PDF, 395 KB

english, 2010

34

A moving window correlation method to reduce the distortion of scanning probe microscope images

Chu, Wei, Fu, Joseph, Dixson, Ronald, Orji, George, Vorburger, Theodore

Journal:

Review of Scientific Instruments

Année:

2009

Langue:

english

Fichier:

PDF, 626 KB

english, 2009

35

Line edge roughness metrology using atomic force microscopes

Orji, Ndubuisi G, Vorburger, Theodore V, Fu, Joseph, Dixson, Ronald G, Nguyen, Cattien V, Raja, Jayaraman

Journal:

Measurement Science and Technology

Année:

2005

Langue:

english

Fichier:

PDF, 1.02 MB

english, 2005

36

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Metrology, Inspection, and Process Control for Microlithography XII - Measurement of pitch and width samples with the NIST calibrated atomic force microscope

Dixson, Ronald G., Koening, Rainer G., Vorburger, Theodore V., Fu, Joseph, Tsai, Vincent W., Singh, Bhanwar

Année:

1998

Langue:

english

Fichier:

PDF, 753 KB

english, 1998

37

SPIE Proceedings [SPIE Scanning Microscopy 2010 - Monterey, California (Monday 17 May 2010)] Scanning Microscopy 2010 - Optimal compression and binarization of signature profiles for automated bullet identification systems

Chu, Wei, Song, John, Vorburger, Theodore, Thompson, Robert, Renegar, Thomas, Silver, Richard, Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Joy, David C.

Année:

2010

Langue:

english

Fichier:

PDF, 937 KB

english, 2010

38

[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Linewidth Measurement Based on Automatically Matched and Stitched AFM Images

Chu, Wei, Fu, Joseph, Dixson, Ronald, Vorburger, Theodore, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.

Année:

2007

Langue:

english

Fichier:

PDF, 816 KB

english, 2007

39

[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Correction of Hysteresis in SPM Images by a Moving Window Correlation Method

Fu, Joseph, Chu, Wei, Dixson, Ronald, Orji, George, Vorburger, Theodore, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.

Année:

2009

Langue:

english

Fichier:

PDF, 1.13 MB

english, 2009

40

Angular Distribution of Light Scattered from a Sinusoidal Grating

Marx, Egon, Germer, Thomas A., Vorburger, Theodore V., Park, Byong C.

Journal:

Année:

2000

Langue:

english

Fichier:

PDF, 184 KB

english, 2000

41

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - An image stitching method to eliminate the distortion of the sidewall in linewidth measurement

Zhao, Xuezeng, Fu, Joseph, Chu, Wei, Nguyen, Cattien, Vorburger, Theodore V., Silver, Richard M.

Année:

2004

Langue:

english

Fichier:

PDF, 429 KB

english, 2004

42

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Interferometry: Surface Characterization and Testing - Effects of thin films on interferometric step height measurements

McWaid, Thomas H., Vorburger, Theodore V., Song, Jun-Feng, Chandler-Horowitz, Deane, Creath, Katherine, Greivenkamp, John E.

Année:

1992

Langue:

english

Fichier:

PDF, 263 KB

english, 1992

43

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Subnanometer wavelength metrology of lithographically prepraed structures: a comparison of neutron and X-ray scattering.

Jones, Ronald L., Hu, Tengjiao, Lin, Eric K., Wu, Wen-li, Casa, Diego M., Orji, N. G., Vorburger, Theodore V., Bolton, Patrick J., Barclay, George G., Herr, Daniel J.

Année:

2003

Langue:

english

Fichier:

PDF, 306 KB

english, 2003

44

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Toward traceability for at-line AFM dimensional metrology

Dixson, Ronald G., Guerry, Angela, Bennett, Marylyn H., Vorburger, Theodore V., Postek, Jr., Michael T., Herr, Daniel J. C.

Année:

2002

Langue:

english

Fichier:

PDF, 182 KB

english, 2002

45

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Scattering and Surface Roughness - Scattering from sinusoidal gratings

Park, Byong Chon, Vorburger, Theodore V., Germer, Thomas A., Marx, Egon, Gu, Zu-Han, Maradudin, Alexei A.

Année:

1997

Langue:

english

Fichier:

PDF, 514 KB

english, 1997

46

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Metrology, Inspection, and Process Control for Microlithography XV - Silicon single atom steps as AFM height standards

Dixson, Ronald G., Orji, Ndubuisi G., Fu, Joseph, Tsai, Vincent, Williams, Ellen D., Kacker, Raghu, Vorburger, Theodore V., Edwards, Hal L., Cook, Debra, West, Paul E., Nyffenegger, Ralph, Sullivan, N

Année:

2001

Langue:

english

Fichier:

PDF, 192 KB

english, 2001

47

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Implementation of Reference Measurement System using CD-AFM

Dixson, Ronald G., Guerry, Angela, Bennett, Marylyn H., Vorburger, Theodore V., Bunday, Benjamin D., Herr, Daniel J.

Année:

2003

Langue:

english

Fichier:

PDF, 167 KB

english, 2003

48

SPIE Proceedings [SPIE International Symposium on Optical Fabrication, Testing, and Surface Evaluation - Tokyo, Japan (Wednesday 10 June 1992)] Intl Symp on Optical Fabrication, Testing, and Surface Evaluation - Present and future standard specimens for surface-finish metrology (Summary Only)

Vorburger, Theodore V., Song, Jun-Feng, Marx, Egon, Scace, Robert I., Lettieri, Thomas R., Tsujiuchi, Jumpei

Année:

1992

Langue:

english

Fichier:

PDF, 93 KB

english, 1992

49

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Reference metrology in a research fab: the NIST clean calibrations thrust

Dixson, Ronald, Allgair, John A., Raymond, Christopher J., Fu, Joe, Orji, Ndubuisi, Renegar, Thomas, Zheng, Alan, Vorburger, Theodore, Hilton, Al, Cangemi, Marc, Chen, Lei, Hernandez, Mike, Hajdaj, Ru

Année:

2009

Langue:

english

Fichier:

PDF, 603 KB

english, 2009

50

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Optical Scatter: Applications, Measurement, and Theory - Sinusoidal surfaces as standards for BRDF instruments

Marx, Egon, Lettieri, Thomas R., Vorburger, Theodore V., McIntosh, Malcolm B., Stover, John C.

Année:

1991

Langue:

english

Fichier:

PDF, 169 KB

english, 1991